15

Submicron resolution photolithography by spectral shaping

Year:
1982
Language:
english
File:
PDF, 366 KB
english, 1982
17

Plasma etching: An enabling technology for gigahertz silicon integrated circuits

Year:
1993
Language:
english
File:
PDF, 1.48 MB
english, 1993
36

Submicron resolution deep UV photolithography

Year:
1981
Language:
english
File:
PDF, 368 KB
english, 1981